CVDSim3D 

CVDSim3D is a software designed for 3D modeling of heat transfer, flows, chemical reactions, and growth rates in CVD reactors with lamp, resistive and inductive heating for growth of different materials. The software includes the complete range of functions from geometry import and drawing to visualization of obtained results. This enables efficient use of the software for analysis and optimization of CVD processes.

MOCVD of Si

CVD of SiC