CVDSim3D 

CVDSim3D is a physics based software tool for modeling of chemical vapor deposition processes.  Simulation capabilities include  3D modeling of heat transfer, flows, and chemical reactions. Software can be used for recipe optimization in terms of better growth rate and doping uniformity. It can be used for CVD reactors with lamp, resistive and inductive heating. It includes tools for geometry specification and import, built in chemical models, and visualization of the obtained results.