Modeling of Epitaxy and Deposition

Thin film epitaxy: Virtual Reactor (VR)  and CVDSim3D

• III-Nitrides
• III-Vs
• CVD SiC,  HTCVD of SiC
• CVD Si and SiGe
• HVPE of III-Vs and Oxides, MOCVD of Oxides

Strain/relaxation during the epitaxy of nitride heterostructures: STREEM InGaN, STREEM AlGaN

MPCVD of Diamond: DiaDeMo

Poly-silicon deposition by the Siemens Process: PolySim